Diamond-like Nanocomposite (DLN) Films for Microelectro-Mechanical System (MEMS)
T S Santra, T K Bhattacharyya, F G Tseng and T K Barik. Diamond-Like Nanocomposite (DLN) Films for Microelectro-Mechanical System (MEMS). IJCA Proceedings on International Symposium on Devices MEMS, Intelligent Systems & Communication (ISDMISC) (6):6-9, 2011. Full text available. BibTeX
@article{key:article,
author = {T. S. Santra and T. K. Bhattacharyya and F. G. Tseng and T. K. Barik},
title = {Diamond-Like Nanocomposite (DLN) Films for Microelectro-Mechanical System (MEMS)},
journal = {IJCA Proceedings on International Symposium on Devices MEMS, Intelligent Systems & Communication (ISDMISC)},
year = {2011},
number = {6},
pages = {6-9},
note = {Full text available}
}
Abstract
Diamond-like nanocomposite (DLN) thin films were deposited on pyrex glass or silicon substrate by plasma enhanced chemical vapor deposition (PECVD) method. These types of films have their unique number of structural, mechanical and tribological properties, which are quite similar with MEMS material properties. DLN films provide a number of unique and attractive characterization properties that are unattainable from diamond-like carbon (DLC) films, silicon or other materials. These properties include high hardness, high modulus of elasticity, very low surface roughness, low friction coefficient, high tensile strength, low thermal expansion coefficient, good wear resistance property and biocompatibility. Due to these properties, DLN films can highly applicable in MEMS/NEMS devices. There are two different ways of applications of DLN films in MEMS/NEMS: either a surface coating material or a structural material. In this paper, we suggest the use of DLN films as a coating material mainly to improve the wear and friction of micro components and reduce stiction between microstructure and their substrate. The high mechanical properties of this type of DLN films exploited the design of high frequency resonator and comb deriver for sensing and actuating applications. As a biocompatible material, we can use DLN films for detection of bio-molecules in biological research and disease diagnosis.
Reference
- Yang,W. J., Choa, Y. H., Sekino,T., Shim, K. B., Nihara, K. and Auh, K. H. 2003. “Structural characteristics of diamond-like nanocomposite thin films grown by PECVD”, Mater. Lett. 57, 3305– 3310.
- Neerinck,D., Persoone, P., Sercu, M., Goel, A., Venkatraman, C., Kester, D., Halter, C., Swab, P. and Bray, D. 1998.“Dimond-like nanoomposite coatings for low-wear and low-friction application in humid environments”, Thin Solid Films 317, 402-404.
- Das, T., Ghosh, D., Bhattacharyya, T. K. and Maiti, T. K. 2007. “Biocompatibility of diamond-like nanocomposite thin films”, J. Mater. Sci.: Mater. Med. 18, 493-500.
- Spengen, W. M., Puers, R. and Wolf, I. D. 2003. MEMS reliability from failure mechanism perspective 17, p. 563.
- http://www.sandia.gov/media/NewsRel/NR2000/ diamond.htm
- Grill, A. 1997. “Tribology of Diamond-like carbon and related materials: an updated review”, Surf. Coat. Technol. 94-95, 507-513.
- Marchon, B., Heiman, N., Khan, M. R., Lautie, A., Ager, W. J. and Veris, D. K. 1991. ”Raman and resistivity investigations of carbon overcoat of thin film media: correlation and tribological properties” J. Appl. Phys. 69, 5748-5750.
- Luo, K., Fu, Y. Q., Le, H. R., Williams, J. A., Spearing, S. M. and Milne, W. I. 2007. “ Diamond-like carbon for MEMS” J. Micro. Macro. Eng. 17, S83-S90.
- Santra, T. S., Liu, C. H., Bhattacharyya, T. K., Patel, P. and Barik, T. K. 2010. “Characterization of diamond- like nanocomposite (DLN) thin films grown by PECVD”, J. Appl. Phys. 107, 124324(1-9).
- IEEE Transactions on electron devices 1978. vol. ED25, no.10, p.1249.
- IEEE MEMS Workshop, 1993. Florida, P. 25.
- Bhusan, B. and Li, X. 1997. Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices, vol. 12, pp. 54-63.
- CRC Materials Science and Engineering Hand-Book, 2002, p. 474.
- IEEE MEMS Workshop 1991, Nara, Japan, p. 151.
- Tanner, D. M., Miller, W. M., Peterson, K. A., Dugger, M. T., Eaton, W. P., Irwin, L. W., Senft, D. C., Smith, N. F., Tangyunyon, F. P. and Miller, S. L. 1999. “Frequency dependence of the lifetime of a surface micromachined microengine driving a load”, J. Microelectron. Reliab. 39, 401-414.
- Kim, D., Cao, D., Bryant, M. D., Meng, W. J. and Ling, F. F. 2005. “Tribological study of microbearing for MEMS applications”, J. Tribol. 127, 537-547.
- Sandia National Laboratries, available at http://www.sandia.gov/media/NewsRel/NR2000/diamond.htm