A Review on Optimized Accelerometer Design for High Performance Application
Manu C Mathew, Grace J Jency and Anoop Prakash A B. Article: A Review on Optimized Accelerometer Design for High Performance Application. IJCA Proceedings on International Conference on Innovations In Intelligent Instrumentation, Optimization and Electrical Sciences ICIIIOES(7):32-37, December 2013. Full text available. BibTeX
@article{key:article,
author = {Manu C Mathew and J. Grace Jency and Anoop Prakash A B},
title = {Article: A Review on Optimized Accelerometer Design for High Performance Application},
journal = {IJCA Proceedings on International Conference on Innovations In Intelligent Instrumentation, Optimization and Electrical Sciences},
year = {2013},
volume = {ICIIIOES},
number = {7},
pages = {32-37},
month = {December},
note = {Full text available}
}
Abstract
Due to the anisotropic characteristics of the energy resolution in crystal space, piezoresistive effect of doped silicon piezoresistors are used for sensing stress on accelerometer structures. Piezoresistive accelerometers are the most popular and widely used method of acceleration sensing due to their simplicity in fabrication, packaging and inherent ruggedness. Moreover, piezoresistive sensors show excellent DC response and hybrid packaging of the sensor chip with signal processing chip in the same package can be used without any signal loss. The performance of the accelerometer which is characterized by the sensitivity and resolution of the accelerometer has a direct impact on the parameters like the size, doping concentration and temperature coefficient of sensitivity of the piezoresistor, noises, power consumption and temperature sensitivity of the accelerometer. It is quite difficult to determine the accelerometer performance only based on some of those parameters. Among these parameters, doping concentration, stress on the piezoresistor and temperature sensitivity is the major factors that affect the performance of the accelerometer. Hence in this paper we investigate on various methods adopted for enhancement of these performance dependent parameters of the accelerometer.
References
- Ahmed A. S. Mohammed, Walied A. Moussa, Edmond Lou 2008 High Sensitivity MEMS Strain Sensor: Design and Simulation Sensors, 8, 2642-2661
- Amarasinghe R. , Dao D. V. , Toriyama T. , Sugiyama S. 2005, Design and fabrications of a miniaturized six-degree-offreedom piezoresistive accelerometer, J. Micromech.
- Hong Chen, Minhang Bao, haijun Zhu, Shaoqun Shen 1997 A piezoresistive accelerometer with novel vertival beam structure sensors and actuators A 63 19-25
- E. Jesper. Eklund, Andrei. M. Shkel 2007 Single-mask fabrication of high-G piezoresistive accelerometers with extended temperature range J. Micromech. Microeng. 17 730–736
- Kal S. , Das S. , Maurya D. K. , Biswas K. , Ravi Sankar A. , Lahiri S. K. 2006, CMOS compatible bulk micromachined silicon piezoresistive accelerometer with low off-axis sensitivity, Microelectron. J. , 37, pp. 22–30
- Kijin K. , Sekwang P. 1998 A bulk micromachined three-axis accelerometer using silicon direct bonding technology and polysilicon layer, Sens. Actuat. A, 66, pp. 250–255
- Kyu Hyun Kim, Jong Soo Ko, Young-Ho Cho, Kwyro Lee, 1995 A skew symmetric cantilever accelerometer for automotive airbag applications Sensors and actuators A 50 121-126
- Patridge A. , Reynolds J. K. , Benjamin W. C. , ET AL. , 2000 A high-performance planar piezoresistive accelerometer, J. Microelectromech. Syst. , 9, pp. 58–66
- Ranjith Amarasinghe, Dzung Viet Dao, Toshiyuki Toriyama and Susumu Sugiyama, A Silicon Micromachined Six-Degree of Freedom Piezoresistive Accelerometer
- Tan. D. Tran, Dzung. V. Dao, Tung. T. Bui, Long. T. Nguyen, Thuy. P. Nguyen, Sugiyama Susumu, 2008, Optimum Design Considerations for a 3-DOF Micro Accelerometer Using Nanoscale Piezoresistors 3rd IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems January 6-9,
- T. H. Tan, D. W. McNeill, P. Baine, J. H. Montgomery, S. J. N Mitchell. Investigation of piezoresistive effect in p-type silicon using four point bending method
- R. P. Van Kampen, R. F. Wolffenbuttel, 1998, Modeling the mechanical behavior of bulk-micromachined silicon accelerometers sensors and actuators A 64 137-150
- A. Ravi Sankar, J. Grace Jency, J. Ashwini, S. Das, 2012, Realisation of silicon piezoresistive accelerometer with proof mass-edge-aligned-flexures using wet anisotropic etching Micro & Nano Letters, Vol. 7, Iss. 2, pp. 118–121
- A. Ravi Sankar, J. Grace Jency, S. Das Design, 2011, Design, fabrication and testing of a high performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures springer 03 December
- Ravi Sankar A. , Lahiri S. K, Das S. 2009, Performance enhancement of a silicon MEMS piezoresistive single axis accelerometer with electroplated gold on a proof mass, J. Micromech. Microeng. , 19, article id 025008